

Competence in coatings and complex mechanical systems allows Amcoss to offer parts and repairs for a wide range of components used in the production process which undergo extreme stress from temperature and chemical exposure. RTP and UV reflector plates, lamp housings, temperature calibration tools, bearings, and sleeves are among the specialized parts that can be supported.

Process Components

RTP, CVD, EPI parts & repairs

HIGHLIGHTING



Amcoss specializes in the repair and renewal of optical parts and mechanical components for Canon, Nikon, and ASML lithography systems. Lenses, reflectors, and mirrors can be recoated and/or replaced. We also service stepper chucks, wafer tables, shutters, and motors. The highest standard of repairs are assured with advanced spectroscophy systems used to verify optical quality.

Lithography

Refurbished components

Semisola Solutions LLC

WAFERTEC PUMP REPAIRS Now offering repair & refurbishment of Wafertec F30, F32, S30 & F1 pumps and controllers. Replacement systems also available.

Semisola Solutions partners with Amcoss of Austria for optics and process refurbishment & repairs.

Amcoss manufactures and/or rebuilds and repairs critical parts for plasma chambers such as ESC chucks as well as ISO and DSQ Heater Paddles. This service means improved productivity, reliability and importantly, lower costs.

AMAT RTP Tempmatch Tools need to be calibrated on a regular basis to ensure highest precision of emitted optical radiation. Calibration services from Amcoss use a NIST qualified black box furnace and reference pyrometers for precise results.

Offering smart, modern, and sustainable substrate processing and process technology in manual, semi- automatic and fully automatic single wafer, and batch processing systems.